TY  - SER
AU  - Nishiguchi, Masanori
AU  - Goto, Noboru
AU  - Nishizawa, Hideaki
TI  - High Mechanical Reliability of Back-Ground Gaas Lsi Chips with  Low Thermal Resistance
KW  - Gaas Lsi Chips
KW  - Thermal Resistance
KW  - Back-Ground
ER  -