TY  - SER
AU  - Hopper, andy
AU  - Jones, Alan
AU  - Augur, Roderick Alan
TI  - A Feasibility Study  for Fabrication of Planar Silicon Multichip Modules Using Electron Beam lithography  for  Precise Location and Interconnection of Chips
KW  - Feasibility Study
KW  - lithography
KW  - Electron Beam
ER  -