TY  - SER
AU  - Smy, Tom
AU  - Tan, liang
AU  - Broughton, James N.
TI  - A SimulatIIon Study of Long Throw Sputtering  for  Diffusion Barrier Deposition Into Gigh Aspect Vias and Contacts
KW  - Integrated Circuit Metalilzation
KW  - Semiconductor Process Modeling
KW  - Simulation
ER  -