TY  - SER
AU  - Amazawa, Takao
AU  - Arita, Yoshinobu
AU  - Yamamoto, EIIchi
TI  - Planarized Multilevel Interconnection Using Chemical Mechanical Polishing of Selective Cvd-Ai Via Plugs
KW  - Aluminum Integrated Circuit Conductors
KW  - Electromigration
KW  - Cmp
ER  -