TY  - SER
AU  - liu, Ping
AU  - Hsiao, Tommy C.
AU  - Woo, Jason C. S.
TI  - A Low Thermal Budget Self-Aligned Ti Silicide Technology Using Germanium Implantation  for  Thin-Film Sol Mosfet'S
KW  - Cmos
KW  - Silicide
KW  - Soi
ER  -