liu, Ping Hsiao, Tommy C. Woo, Jason C. S. <br/><br/>
A Low Thermal Budget Self-Aligned Ti Silicide Technology Using Germanium Implantation  for  Thin-Film Sol Mosfet'S 

 - 1280-1286 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cmos<br/>Silicide<br/>Soi