TY  - SER
AU  - Paulsen, Ronald E.
AU  - Kyono, Carl S.
AU  - Reno, Chris
TI  - Process Integration of an Interlevel Dielectric (Ildo) Module Using a Buildin-In Reliability Approach
KW  - Cmos Memory
KW  - Gettering
KW  - Ic Fabrication Industry
ER  -