Paulsen, Ronald E. Kyono, Carl S. Reno, Chris <br/><br/>
Process Integration of an Interlevel Dielectric (Ildo) Module Using a Buildin-In Reliability Approach 

 - 655-664 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cmos Memory<br/>Gettering<br/>Ic Fabrication Industry