TY  - SER
AU  - Lee, Zachary K.
AU  - Mclirath, Michael B.
AU  - Antoniadis, Dimitri A.
TI  - Two-Dimensional Doping Profile Characterization of Mosfet'S by Inverse Modeling Using Characteristics InSubthreshold Region
KW  - Doping Profiles
KW  - Halo Doping
KW  - Inverse Modelilng
ER  -