Lee, Zachary K. Mclirath, Michael B. Antoniadis, Dimitri A. <br/><br/>
Two-Dimensional Doping Profile Characterization of Mosfet'S by Inverse Modeling Using Characteristics InSubthreshold Region 

 - 1640-1649 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Doping Profiles<br/>Halo Doping<br/>Inverse Modelilng