TY  - SER
AU  - Lee, Jinji
AU  - Epstein, Yefim
AU  - Hess, Karl
TI  - The Effect of Deuterium Passivation at Different Steps of Cmos Processing on lifetime Improvements of Cmos Transistors
KW  - Cmos
KW  - Deuterium
KW  - Hot-Carrier
ER  -