Lee, Jinji Epstein, Yefim Hess, Karl <br/><br/>
The Effect of Deuterium Passivation at Different Steps of Cmos Processing on lifetime Improvements of Cmos Transistors 

 - 1812-1813 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cmos<br/>Deuterium<br/>Hot-Carrier