TY  - SER
AU  - Yang, Nian
AU  - Henson, W. Kirklen
AU  - Wortman, Jimmie J.
TI  - Modeling Study of Ultrathin Gate Oxides Using Direct Tunneling Current and Capacitance Voltage Measurements in Mos Devices
KW  - Capacitance
KW  - Dielectric Films
KW  - Inversion Layers
ER  -