TY  - SER
AU  - Yang, Tien-Chun
AU  - Sachdev, Pinkesh
AU  - SARaswat, Krishna C.
TI  - Dependence of Fermi Level Positions at Gate and Substrate onReliability of Ultrathin Mos Gate Oxides
KW  - Barrier Height
KW  - Ultrathin Sections
KW  - Oxide
ER  -