TY  - SER
AU  - Goto, Ken-Ichi
AU  - Watanabe, Junji
AU  - Sukegawa, Takae
TI  - A Newleakage Mechanism of Co Salicide and Optimzed Process Conditions
KW  - New Landfili Look
KW  - Optimized Control Method
KW  - Process
ER  -