TY  - SER
AU  - Beuthler, Aliyson J.
AU  - Wargowski, David A
AU  - Singer, Kenneth D.
TI  - Fabrication of Low Loss Polyimide Optical Waveguides Using Thin-Film Multichip Module Process Technology
KW  - Fabrication
KW  - Waveguides
KW  - Process Shift
ER  -