TY  - SER
AU  - Smyth, T.
AU  - Tan, liang
AU  - Chan, K.
TI  - A Simulation Study of Long Throw Sputtering  for  Diffusion Barrier Deposition Into High Aspect Vias and Contacts
KW  - Integrated Circuit Metalilzation
KW  - Semiconductor Process Modeling
KW  - Simulation
ER  -