Horstmann, John T. Goser, Karl F. Hilieringmann, Ulrich <br/><br/>
Matching Analysis of Deposition Defined 50-Nm Mosfet'S 

 - 299-306 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Matching<br/>Deposition<br/>Mosfets