TY  - SER
AU  - Okulan, Nihat
AU  - Henderson, H. Thurman
AU  - Ahn, Chong H.
TI  - A Pulsed Mode Micromachined Flow Sensor with  Temperature Drift Compensation
KW  - Fluid Flow Measurement
KW  - Micromachining
KW  - Semiconductor Devices
ER  -