Zanchi, Alfio Zappa, Franco Ghioni, Massimo <br/><br/>
A Probe Detector  for  Defectivity Assessment in P-N Junctions 

 - 609-616 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Gettering<br/>Integrated Circuitmanufacture<br/>Manufacturing Testing