TY  - SER
AU  - Vogel, Eric M.
AU  - Henson, W. Kirklen
AU  - Suehle, John S.
TI  - limitations of Conductance ToMeasurement OfInterface State Density of Mos Capacitoras with  Tunneling Gate Gate Dielectrdics
KW  - Capacitance
KW  - Conductance
KW  - Dielectric Films
ER  -