TY  - SER
AU  - Miranda, Enrique
AU  - Sune, Jordi
AU  - Campabadal, Francesca
TI  - Soft Breakdon Conduction in Ultrathin (3-5 Nm) Gate Dielectrics
KW  - Charge Injection
KW  - Dielectric Breakdown
KW  - Leakage Currents
ER  -