TY  - SER
AU  - Milis, Randeli   L.
AU  - Dhandapani, Bala
TI  - Excessive Balmer  line Broadening in Capacitively Coupled Rf Water-Vapor Plasmas
KW  - Radio Frequency (Rf) Plasma
KW  - Water-Vapor Plasma
KW  - Significant line Broadening
ER  -