Milis, Randeli   L. Dhandapani, Bala <br/><br/>
Excessive Balmer  line Broadening in Capacitively Coupled Rf Water-Vapor Plasmas 

 - 802-815 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Radio Frequency (Rf) Plasma<br/>Water-Vapor Plasma<br/>Significant line Broadening