TY - SER AU - li, X. P. AU - Cai, M. B. AU - Neo, W. C. L. AU - Seah, K. H. TI - Effect of Crystalilne Orientation of a Diamond Tool onMachined Surface in Ductile Mode Cutting of Silicon KW - Nanoscale Ductile Cutting KW - Silicon KW - Diamond Cut ER -