TY  - SER
AU  - Ikeno, Rimon
AU  - Maruyama, Takashi
AU  - Komatsu, Satoshi
TI  - High-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with  one-Dimensional Via Characters
KW  - Electron Beam Direct Writing
KW  - Character Projection
KW  - Via
ER  -