Suh, Hyo Seon Kim, Do Han Moni, Priya Xiong, Shisheng <br/><br/>
Sub-10-Nm Patterning Via Directed Self-Assembly of Block Copolymer Films with  a Vapour-Phase Deposited Topcoat 

 - 575-581 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Self-Assembly<br/>Block Copolymer<br/>Gratings