TY  - BOOK
AU  - Lysherski, Sergey Edward
TI  - Nano and Micro Electromechanical Systems Fundamentals of Nano and Microengineering 
SN  - 0849328381
U1  - 621.381 
PY  - 2005///
CY  - Boca Raton : 
PB  - CRC Press, 
KW  - Microelectromechanical Systems
KW  - Nanotechnology
N1  - YY
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-8493-2838-1.pdf
ER  -