Lysherski, Sergey Edward <br/><br/>
Nano and Micro Electromechanical Systems Fundamentals of Nano and Microengineering  

 - 2nd 
 - Boca Raton :   CRC Press,   c2005 
 - 722 p.  : ill 
 - Nano and Microscience Engineering Technology and Medicine Series .
<br/><br/>Includes Bibliographical References and Index 
<br/><br/><label>ISBN: </label>0849328381 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical Systems<br/>Nanotechnology
<br/><br/><label>Dewey Class. No.: </label>621.381  / LYS