TY  - BOOK
AU  - May, Gary S.
AU  - Sze, Simon M.
TI  - Fundamentals of Semiconductor Fabrications 
SN  - 981253072X
U1  - 621.38152 
PY  - 2004///
CY  - Singapore : 
PB  - John Wiley Asia, 
KW  - Integrated Circuits Design and Construction
KW  - Semiconductors Design and Construction
N1  - YY
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/9812-53-072-X.pdf
ER  -