TY - BOOK AU - Franssila, Sami TI - Introduction to Microfabrication SN - 0470851066 U1 - 621.3 PY - 2004/// CY - Chichester : PB - John Wiley, KW - Electronic Apparatus and Appliances KW - Microelectromechanical Systems KW - Microfabrication N1 - YY UR - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-470-85106-6.pdf ER -