TY  - BOOK
AU  - Jackson, Mark J.
TI  - Microfabrication and Nanomanufacturing 
SN  - 0824724313
U1  - 620.5 
PY  - 2006///
CY  - Boca Raton : 
PB  - Crc/Taylor and Francis, 
KW  - Integrated Circuits Design and Construction
KW  - Microelectromechanical Systems
KW  - Microelectronics
N1  - YY
UR  - https://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-8247-2431-3.pdf
ER  -