TY  - BOOK
AU  - Wise, Kensall D.
AU  - Guckel, Henry
AU  - Muller, Richard S.
ED  - Japanese Technology Evaluation Center at Loyola College
ED  - Workshop on Microelectromechanical Systems in Japan Wednesday November 17, 1993 Westpark Hotel 1900 Nft Myer Drive Arlington Va Viewgraphs
TI  - Workshop on Microelectromechanical Systems in Japan Wednesday November 17, 1993 Westpark Hotel 1900 Nft Myer Drive Arlington Va Viewgraphs 
U1  - 621.3813952 
PY  - 1993///
CY  - Baltimore : 
PB  - International Technology Research Institute Jtec/Wtec Program Loyola College in Maryland, 
KW  - Microelectromechanical Systems Congresses
KW  - Microelectronics Congresses
N1  - NN
ER  -