Handbook of Silicon Semiconductor Metrology  

 - New York :   Marcel Dekker,   c2001 
 - XVI, 874 p.  : ill 
<br/><br/>
<br/><br/><label>ISBN: </label>0824705068 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors Inspections Handbooks Manuals<br/>Semiconductors Measurements Handbooks Manuals
<br/><br/><label>Dewey Class. No.: </label>621.381522102  / HAN