Normal view
MARC view
Entry Personal Name
001 - CONTROL NUMBER
- control field: 95513
003 - CONTROL NUMBER IDENTIFIER
- control field: NEDUET
005 - DATE AND TIME OF LATEST TRANSACTION
- control field: 20220629131953.0
008 - FIXED-LENGTH DATA ELEMENTS
- fixed length control field: 220629|| aca||aabn | a|a d
040 ## - CATALOGING SOURCE
- Original cataloging agency: NEDUET
- Transcribing agency: NEDUET
100 ## - HEADING--PERSONAL NAME
- Personal name: Sze, Simon M
670 ## - SOURCE DATA FOUND
- Source citation: Work cat.: (NEDUET)107072: May, Gary S. Author 95512, Fundamentals of Semiconductor Fabrications , c2004