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Microelectromechanical Systems Thesis (Topical Term)

Preferred form: Microelectromechanical Systems Thesis

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Work cat.: (NEDUET)105900: ERROR ERROR 43971, Rf Mems Devices and Their Applications in Reconfigurable Rf Microwave Circuits A Dissertation Submitted in Partial Fulfillment of the Requirements for the Degree of Doctor of Philosophy Electrical Engineering in the University of Michigan , c2005