Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 822170

003 - CONTROL NUMBER IDENTIFIER

• control field: NEDUET

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20230819180828.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 230819|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NEDUET
• Transcribing agency: NEDUET

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Material Processing and Packaging

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NEDUET)772866: Tanaka, Masanori 796025, Suppression of Sin-Induced Boron Penetration By Using Sih-Free Silicon Nitride Films for med By Terachlorosilane and Ammonia