Entry Personal Name

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 821378

003 - CONTROL NUMBER IDENTIFIER

• control field: NEDUET

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20230819180649.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 230819|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NEDUET
• Transcribing agency: NEDUET

100 ## - HEADING--PERSONAL NAME

• Personal name: Ikegawa, Masato

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NEDUET)772113: Ikegawa, Masato, Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magnetomicrowave Plasma Etcing Reactors