Normal view MARC view

D-Phemts (Topical Term)

Preferred form: D-Phemts

Machine generated authority record

Work cat.: (NEDUET)752640: Yarn, K. F. 794414, Enhanced Characteristics in Gate-Recessed and Sidewall-Recessed Algaas/Ingasa Phemts By Citric-Based Selective Wet Etching