Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 780574

003 - CONTROL NUMBER IDENTIFIER

• control field: NEDUET

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20230819162821.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 230819|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NEDUET
• Transcribing agency: NEDUET

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Aluminum Integrated Circuit Conductors

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NEDUET)745275: Amazawa, Takao 780571, Planarized Multilevel Interconnection Using Chemical Mechanical Polishing of Selective Cvd-Ai Via Plugs