Entry Topical Term

Number of records used in: 3

001 - CONTROL NUMBER

• control field: 776391

003 - CONTROL NUMBER IDENTIFIER

• control field: NEDUET

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20230819162236.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 230819|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: NEDUET
• Transcribing agency: NEDUET

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Semiconductor Process Modeling

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (NEDUET)743547: Smyth, T. 776386, A Simulation Study of Long Throw Sputtering for Diffusion Barrier Deposition Into High Aspect Vias and Contacts