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Nanoscale Calibration Standards and Methods Dimensional and Related Measurements in the Micro and Nanometer Range (Meeting Name)

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Preferred form: Nanoscale Calibration Standards and Methods Dimensional and Related Measurements in the Micro and Nanometer Range

Machine generated authority record.

Work cat.: (NEDUET)118042: Wilkening, Gunter Editor 108288, Nanoscale Calibration Standards and Methods Dimensional and Related Measurements in the Micro and Nanometer Range , c2005