Nonmelt Laser Annealing of 5-Ke V and 1-Ke V Boron-Implanted Silicon (Record no. 772956)
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000 -LEADER | |
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fixed length control field | 00555nab a2200181Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 230808s2002 |||||||f |||| 00| 0 eng d |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Earles, S |
9 (RLIN) | 822263 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Law, M |
9 (RLIN) | 822265 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Brindos, R |
9 (RLIN) | 822266 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Jones, K |
9 (RLIN) | 822267 |
245 #0 - TITLE STATEMENT | |
Title | Nonmelt Laser Annealing of 5-Ke V and 1-Ke V Boron-Implanted Silicon |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 1118-1123 p. |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Boron |
9 (RLIN) | 404074 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Heavily Doped |
9 (RLIN) | 779967 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Laser Annealing |
9 (RLIN) | 775474 |
773 ## - HOST ITEM ENTRY | |
Place, publisher, and date of publication | 2002 |
Title | Ieee Transactions on Electron Devices |
International Standard Serial Number | 00189383 |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Articles |
-- | 51 |
-- | ABUL KALAM Library |
Not for loan | Home library | Serial Enumeration / chronology | Total Checkouts | Date last seen | Koha item type |
---|---|---|---|---|---|
Engr Abul Kalam Library | Vol.49, No.07 (Jul. 2002) | 19/08/2023 | Articles |