Nonmelt Laser Annealing of 5-Ke V and 1-Ke V Boron-Implanted Silicon (Record no. 772956)

MARC details
000 -LEADER
fixed length control field 00555nab a2200181Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s2002 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Earles, S
9 (RLIN) 822263
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Law, M
9 (RLIN) 822265
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Brindos, R
9 (RLIN) 822266
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Jones, K
9 (RLIN) 822267
245 #0 - TITLE STATEMENT
Title Nonmelt Laser Annealing of 5-Ke V and 1-Ke V Boron-Implanted Silicon
300 ## - PHYSICAL DESCRIPTION
Extent 1118-1123 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Boron
9 (RLIN) 404074
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Heavily Doped
9 (RLIN) 779967
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Laser Annealing
9 (RLIN) 775474
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 2002
Title Ieee Transactions on Electron Devices
International Standard Serial Number 00189383
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
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-- ABUL KALAM Library
Holdings
Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.49, No.07 (Jul. 2002)   19/08/2023 Articles