Method for Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity (Record no. 750402)

MARC details
000 -LEADER
fixed length control field 00629nab a2200157Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s1992 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Mozumder, Purnendu K.
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Lowenstein, Lee M.
9 (RLIN) 791795
245 #0 - TITLE STATEMENT
Title Method for Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity
300 ## - PHYSICAL DESCRIPTION
Extent 311-316 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductor Process Modeling
9 (RLIN) 776391
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Optimization Formulation
9 (RLIN) 791797
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Functional Representation
9 (RLIN) 791798
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 1992
Title IEEE Transactions on Components Hybrids and Manufacturing Technology
International Standard Serial Number 01486411
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
-- 51
-- ABUL KALAM Library
Holdings
Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.15, No.03 (Jun. 1992)   19/08/2023 Articles