Largge Area Fine line Patterning by Scanning Projection lithography (Record no. 742290)
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000 -LEADER | |
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fixed length control field | 00610nab a2200169Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 230808s1995 |||||||f |||| 00| 0 eng d |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Mulier, H |
9 (RLIN) | 773438 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Yuan, Yanrong |
9 (RLIN) | 773439 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Sheets, Ronald E. |
9 (RLIN) | 773441 |
245 #0 - TITLE STATEMENT | |
Title | Largge Area Fine line Patterning by Scanning Projection lithography |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 33-36 p. |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | lithography |
9 (RLIN) | 55168 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Large Angle Bends |
9 (RLIN) | 773444 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Laser Absorption Sensor |
9 (RLIN) | 773446 |
773 ## - HOST ITEM ENTRY | |
Place, publisher, and date of publication | 1995 |
Title | IEEE Transactions on Components, Packaging, and Manufacturing Technology Part-B: Advanced Packaging |
International Standard Serial Number | 10709894 |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Articles |
-- | 51 |
-- | ABUL KALAM Library |
Not for loan | Home library | Serial Enumeration / chronology | Total Checkouts | Date last seen | Koha item type |
---|---|---|---|---|---|
Engr Abul Kalam Library | Vol.18, No.01 (Feb. 1995) | 19/08/2023 | Articles |