Largge Area Fine line Patterning by Scanning Projection lithography (Record no. 742290)

MARC details
000 -LEADER
fixed length control field 00610nab a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s1995 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Mulier, H
9 (RLIN) 773438
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Yuan, Yanrong
9 (RLIN) 773439
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Sheets, Ronald E.
9 (RLIN) 773441
245 #0 - TITLE STATEMENT
Title Largge Area Fine line Patterning by Scanning Projection lithography
300 ## - PHYSICAL DESCRIPTION
Extent 33-36 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element lithography
9 (RLIN) 55168
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Large Angle Bends
9 (RLIN) 773444
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Laser Absorption Sensor
9 (RLIN) 773446
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 1995
Title IEEE Transactions on Components, Packaging, and Manufacturing Technology Part-B: Advanced Packaging
International Standard Serial Number 10709894
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
-- 51
-- ABUL KALAM Library
Holdings
Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.18, No.01 (Feb. 1995)   19/08/2023 Articles