A Method to ImproveEfficiency of Cmp Process (Record no. 740327)

MARC details
000 -LEADER
fixed length control field 00526nab a2200157Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s2001 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Shaw, D. G
9 (RLIN) 768396
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Chang, Jassy
9 (RLIN) 768398
245 #2 - TITLE STATEMENT
Title A Method to ImproveEfficiency of Cmp Process
300 ## - PHYSICAL DESCRIPTION
Extent 661-666 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Chemical Mechanical Polishing
9 (RLIN) 768400
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Clamping Conditions
9 (RLIN) 768401
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Efficiency Improvement
9 (RLIN) 758396
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 2001
Title IEEE Transactions on Components and Packaging Technologies
International Standard Serial Number 15213331
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
-- 51
-- ABUL KALAM Library
Holdings
Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.24, No.04 (Oct. 2001)   19/08/2023 Articles