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Determination of Deep Ultrathin Equivalent Oxide Thickness (Eot) from Measuring Flat-Band C-V Curve

Chen, C.-H.

Determination of Deep Ultrathin Equivalent Oxide Thickness (Eot) from Measuring Flat-Band C-V Curve - 695-698 p.

Subjects--Topical Terms:
Solid-State Power and High Voltage

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