Design Consideration in Micromachined Silicon Microphones
Miao, J. Lin, R Chen, L. Zou, Q
Design Consideration in Micromachined Silicon Microphones - 21-28 p.
Mems
Microphones
Polysilicon Tft
Design Consideration in Micromachined Silicon Microphones - 21-28 p.
Mems
Microphones
Polysilicon Tft