Thickness Dependent Dielectric Breakdown of Pecvd Low-K Carbon Doped Silicon Dioxide Dielectric Thin Films: Modeling and Experiments
Zhou, H Shi, F.G. Zhao, Banghua
Thickness Dependent Dielectric Breakdown of Pecvd Low-K Carbon Doped Silicon Dioxide Dielectric Thin Films: Modeling and Experiments - 259-264 p.
Thickness Dependent
Dielectric
Plasma
Thickness Dependent Dielectric Breakdown of Pecvd Low-K Carbon Doped Silicon Dioxide Dielectric Thin Films: Modeling and Experiments - 259-264 p.
Thickness Dependent
Dielectric
Plasma