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Modeling of Grain Growth Mechanism By Nickel Silicide Reactive Grain Boundary Effect in Metal-Induced-Lateral-Crystallization

Cheng, C F Chan, Mansun Kok, C W

Modeling of Grain Growth Mechanism By Nickel Silicide Reactive Grain Boundary Effect in Metal-Induced-Lateral-Crystallization - 1467-1474 p.

Subjects--Topical Terms:
Crystallization
Polysilicon

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